SURFACE TREATMENT AND PECVD

We offer manual loading machines dedicated to surface treatment applications and / or thin film deposition, for industrial and R&D applications

These machines are available in different versions and equipment levels. They are adaptable to customer needs (volume and shape of the room, number of gas line ...)
They are available in radiofrequency (RF 13.56 MHz) or microwave (MW 2.45 GHz) plasma versions.
(See examples of achievements in the slideshow).

Managed by a PLC or panel PC as required. The management software provides great flexibility and provides different levels of security and traceability. It allows you to work both in manual mode and automatic mode.

The volume of the chamber can vary from a few liters to several m3
.
The choice of the pumping system also depends on the application (vacuum limit level, pace ...) : Primary pumps, Roots pumping units, turbo-molecular pump.

Rotating drum machines

For the preparation of bulk material surface, we offer rotary drum machines. The volume of the drum up to several tens of liters.